In order to realize the high precision and large load of the electron microscope,the motor drive and sensor signal processing circuit of displacement and force are designed in this paper．Sensor signal is received through NI －USB6363 acquisition card and processed by LabVIEW softwares which provide feedback．

鍩轰簬LabVIEW鐨勭數闀滄媺浼稿彴鎺у埗绯荤粺璁捐

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